高精度MEMS陀螺组合及应用技术研究

Research on MEMS Products and Application Technology

摘要:

为满足航天器姿态控制精度高，动态特性好的要求，开展了高精度MEMS陀螺组合设计和应用技术的研究，重点解决系统使用环境中存在的温度特性差，力学环境下性能劣化等问题。通过采用结构分体环形减振、系统温度补偿等设计，降低了力学环境的影响，提高了全温条件下的输出精度。经测试和地面试验验证，在-20℃~70℃范围内静态输出精度优于1.5°/h，8.46g振动条件下精度变化小于3°/h；有效抑制了环境因素带来的误差影响，提升了MEMS陀螺应用精度，具有良好的应用前景。

Abstract:

To meet the requirements of high attitude control precision and excellent dynamic characteristics for spacecraft, research on the design and application technology of high-precision MEMS gyroscope assemblies was carried out. The focus was on addressing issues such as poor temperature characteristics and performance degradation under mechanical environments in the system's operating conditions. By adopting designs like split-structure annular vibration damping and system temperature compensation, the impact of mechanical environments was reduced, and the output precision under full-temperature conditions was improved. Verified through tests and ground experiments, the static output precision is better than 1.5°/h within the range of -20℃~70℃, and the precision variation is less than 3°/h under 8.46g vibration conditions. This effectively suppresses error impacts caused by environmental factors, enhances the application precision of MEMS gyroscopes, and boasts broad application prospects.