Abstract:The three-dimensional sensor at the end of the robot actuator needs to accurately perceive the force in the three-dimensional direction. The three-dimensional force sensor of the micro-structure is studied. A three-dimensional force sensor of the micro-structure is designed based on the measurement principle of resistance strain gauge, and the three-dimensional force calibration of the sensor is carried out. The algorithm is applied to complete the three-dimensional force static decoupling of the sensor. The relationship formula to be solved is downloaded to the MCU of the sensor, and the on-line decoupling is realized. Finally, the index parameters of the sensor are quantitatively evaluated and the error causes are analyzed. The experimental calibration data show that the sensor has high precision, the radial error of class I is less than 3%, the axial error is 4.6892%, and the class II error is less than 0.3% in all three directions. Through practical application, it can meet the requirements of 3D force measurement for precision operation execution end.