基于模拟退火算法下多位相型达曼光栅分束器的设计

Design of multi-phase Dammann grating beam splitter based on simulated annealing algorithm

摘要:

针对传统达曼光栅分束器衍射效率与光强度均匀性低等问题，提出了一种基于模拟退火算法下多位相型达曼光栅分束器的设计方法。基于标量衍射理论，对多位相型Dammann光栅分束器的相位结构设计进行研究。在原二值型突变点坐标的基础上，使用模拟退火算法对光栅一个周期内的位相结构进行离散、调制，并合理的控制目标函数来对相位结构进行优化设计。其次，以9×9点阵Dammann光栅分束器的位相结构设计为例进行仿真分析，得到了衍射效率为85.3%、光强不均匀性为0.0952%、均方根误差为8.2×10-5的位相型分束光栅。最后，进行实验验证，得到衍射效率达到73.5%、光强不均匀性达到10.0%、均方根误差达到0.255。结果表明，该方法具有优越性和实用性，为实际应用中三维测量结构光的产生提供了理论基础。

Abstract:

A design method of multiphase Dammann grating beam splitter based on simulated annealing algorithm is proposed to address the problems of low diffraction efficiency and optical intensity uniformity of the conventional Dammann grating beam splitter. Based on the scalar diffraction theory, the phase structure design of the multiphase Dammann grating beam splitter is investigated. Based on the original binary mutation point coordinates, a simulated annealing algorithm is used to discretize and modulate the phase structure of the grating within one cycle, and a reasonable control objective function is used to optimize the phase structure design. Next, the design of the dislocation structure of a 9×9 point Dammann grating beam splitter is simulated, and a dislocation grating with diffraction efficiency of 85.3%, optical intensity inhomogeneity of 0.0952%, and root mean square error of 8.2×10-5 is obtained. The results show that the method is superior and practical, and provides a theoretical basis for the generation of structured light for 3D measurement in practical applications.