Abstract:the reference 3D physical model of the oil-air lubricated ECT sensor is established; The influences of four structural parameters, namely the thickness of the pipeline, the length of the capacitive electrode, the length of the axial shielded electrode and the depth of the radial shielded electrode, on the performance of the sensor are analyzed and their optimization ranges are determined. The sensor performance optimization function is established by sensitivity influence coefficient and capacitance response ratio. The response surface method is used to optimize the design of the above four structural parameters. On this basis, through the relative error of image and the image correlation coefficient, the quality of the reconstructed image of the optimized sensor is evaluated to verify its reliability. The research results show that the image quality obtained by the optimized sensor is the highest, the relative error of image is decreased by 22.99% on average, and the image correlation coefficient is increased by 21.73% on average.