压阻式高温压力传感器温度补偿与信号调理设计与测试

Design and test of temperature compensation and signal conditioning of piezoresistive high temperature pressure sensor

摘要:

设计制作了一种集成信号调理电路的高温压阻式压力传感器，包含倒装式的压敏敏片、无源电阻温度补偿电路和信号调理电路组成。压敏芯片的制作采用SOI材料和MEMS标准工艺，温度补偿和信号调理电路采用高温电子元件。试验表明，无源电阻温度补偿具有显著的效果。此外，采用了高温信号调理电路来提高传感器的输出灵敏度，通过温度补偿来降低输出灵敏度。与传统的经验算法相比，所提出的无源电阻温度补偿技术具有更小的温度漂移，在220℃条件下传感器输出灵敏度为4.93mV/100KPa，传感器灵敏度为总体测量精度为±2%FS。此外，由于柔性传感器的输出电压可调，因此不需要使用一般的电压转换器随动压力变送器，这大大降低了测试系统的成本，有望在恶劣环境下的压力测量中得到高度应用。

Abstract:

A high-temperature piezoresistive pressure sensor with integrated signal conditioning circuit is designed and manufactured, which consists of flip-chip pressure sensitive film, passive resistance temperature compensation circuit and signal conditioning circuit.The production of pressure-sensitive chips uses SOI materials and MEMS standard technology, and the temperature compensation and signal conditioning circuits use high-temperature electronic components.Experiments show that passive resistance temperature compensation has significant effects. In addition, a high-temperature signal conditioning circuit is used to improve the output sensitivity of the sensor, and temperature compensation is used to reduce the output sensitivity.Compared with the traditional empirical algorithm, the proposed passive resistance temperature compensation technology has a smaller temperature drift,The output sensitivity of the sensor is 4.93mV/100KPa under the condition of 220℃, and the overall measurement accuracy of the sensor is ±2%FS..In addition, because the output voltage of the flexible sensor is adjustable, there is no need to use a general voltage converter to follow the pressure transmitter, which greatly reduces the cost of the test system, and is expected to be highly applied in pressure measurement in harsh environments.