薄膜热电极尺寸效应分析及试验研究

Size Effect Analysis and Test Study for Thin Film Thermocouple electrode

摘要:

薄膜型热电极作为薄膜热电偶结构的核心部位,其尺寸设计对热电偶功能及性能的实现起着重要作用。文章研究了热电偶电极薄膜的尺寸效应,建立了薄膜热电偶热电及热传导机理数学模型,分析了热电极尺寸对热电偶静态及动态特性的影响,设计并制作了不同尺寸规格热电极的薄膜热电偶,对热电极的尺寸效应物理性能开展了试验研究,试验结果表明热电偶电极薄膜厚度与动态响应时间呈正相关,长度、宽度、面积等尺寸参数对热电偶特性无明显影响,为薄膜热电偶电极尺寸设计提供了理论基础与工程依据。

Abstract:

As the core part of thin film thermocouple structure, the size design of thin film thermocouple electrode plays an important role in the realization of thermocouple function and performance. The size effect analysis of thermocouple electrode thin film is taken as the research object in this paper. The relevant mathematical model based on the mechanism of thermoelectricity and heat conduction is established. The effect of thin film thermocouple electrode size on the static and dynamic characteristics of thermocouples is anlysed. The thin film thermocouple electrode with different size are designed and manufactured. The experimental about the physical performance of size effect are carried out. The experimental results show that the thickness of thermocouple electrode thin film has a positive correlation with the dynamic response time, and the length, width and area have no obvious influence on the characteristics of the thermocouple, which provide a sufficient theoretical and engineering basis for the design of the electrode size of the thin film thermocouple.