非侵入式激光探针装备故障注入技术研究及应用

Research on Equipment Fault Injection Technology of Pulsed Laser Single Event Effect

摘要:

针对装备大规模集成电路测试性验证与评估需求，突破传统方式的故障注入难、耗资耗时等限制，开展半侵入式装备激光探针故障注入技术研究及应用。首先，研究了装备传统物理故障注入技术，分析了脉冲激光瞬态故障注入方式的可行性及作用机理；然后，建立了脉冲激光瞬态故障注入的能量传输模型，提出了基于单光子吸收机制的脉冲激光等效LET计算方法；最后进行了试验验证。试验表明，该方法成功实现了典型故障模式的准确复现，可精确定位芯片内薄弱部位以指导装备优化设计。

Abstract:

To meet the requirements of testability verification and evaluation of equipment integrated circuit, break through the difficult fault injection, cost and time limits, it carried out research and application on equipment fault injection technology of semi-invasive laser probe. Firstly, the equipment traditional physical fault injection technology is studied, the feasibility and mechanism of pulsed laser transient fault injection are analyzed; Secondly, the energy transfer model of pulsed laser transient fault injection was established and the calculation method of pulsed laser energy based on linear transmission is presented; Finally, the experimental verification was carried out. The test shows that the method successfully realizes the accurate reproduction of typical fault modes, it can precisely locate the weak spot inside the chip to guide the optimal design of equipment.