一种用于高能离子注入机射频加速的数字移相器设计

Design of a digital phase shifter for RF acceleration of high energy ion implanter

摘要:

设计了一种基于STM32F405RGT6微处理器和AD9959的高能离子注入机射频加速用数字移相器,首先介绍了移相器的系统组成和工作原理及如何实现高能离子注入机多腔射频加速系统中射频电源的相位控制,然后对微处理器、DDS芯片AD9959、时钟分配芯片AD9510等硬件电路原理和控制软件设计作了详细的介绍；实验结果表明该移相器实现了16通道正弦信号输出,输出波形频率和相位值分辨率分别高达0.02Hz和0.05°,可以完成任意两路之间的相位差调节和设置。该移相器结构简单,性能稳定可靠,能够满足高能离子注入机多腔射频加速系统中射频电源的相位控制要求。

Abstract:

A digital phase shifter for RF acceleration of high energy ion implanter based on stm32f405rgt6 microprocessor and AD9959 is designed. Firstly, the system composition and working principle of the phase shifter and how to realize the phase control of RF power supply in the multicavity RF acceleration system of high energy ion implanter are introduced. Then the hardware circuit principle and control software design of microprocessor, DDS chip AD9959 and clock distribution chip ad9510 are introduced in detail. The experimental results show that the phase shifter realizes 16 channel sinusoidal signal output, and the resolution of output waveform frequency and phase value is up to 0.02Hz and 0.05 ° respectively, and it can adjust and set the phase difference between any two channels. The phase shifter has simple structure, stable and reliable performance, and can meet the phase control requirements of the RF power supply in the multicavity RF acceleration system of the high energy ion implanter.