Abstract:This paper designs a dose detection controller for ion implanter based on STM8S208MBT6. Firstly, it introduces the overall design and working principle of the dose detection controller and how to realize the accurate detection of ion beam current and uniformly inject ion dose into the wafer surface. Then it details hardware circuit design and control software design for current/voltage conversion, peak detection, calibration current source, analog/digital conversion of controller. The experimental results show that the controller achieves fast range switching over a wide range of beams. The switching time is more than 1ms, the measurement accuracy of beam value is up to 0.01%, and the minimum range is as low as 2uA. The controller has simple structure, stable and reliable operation, and has broad application prospects.
