基于参数激励的MEMS环式陀螺驱动方法与实现

Improvement of MEMS gyroscope driving method based on parametric excitation

摘要:

MEMS环式陀螺仪是一种基于哥氏力效应设计出的测量角速度的惯性传感器，其性能与驱动模态直接相关。因此，在传统PLL-AGC驱动控制方法中引入参数激励信号，按照参数激励法驱动陀螺仪，陀螺仪的刚度产生周期性变化，降低驱动信号从而抑制因电馈通导致的驱动端对敏感端产生的误差信号，提高陀螺仪灵敏度。对参数激励的效果进行研究，经实验表明，通过改变参数激励信号的参数，可在驱动响应稳定的前提下对驱动信号进行抑制，在实际测试中驱动信号的幅值下降22.75%。

Abstract:

MEMS ring gyroscope is an inertial sensor designed to measure angular velocity based on the Coriolis force effect. Its performance is directly related to the driving mode. Hence, according to an innovative method called parameter excitation, the parameter excitation signal is introduced in the PLL-AGC drive control method. The stiffness of the gyroscope changes periodically to suppress the quadrature error signal caused by electrical feed-through and to improve the sensitivity of gyroscope. Research on the effect of parameter excitation, experiments show that the driving signal can be adjusted under the premise of stable response, by changing the parameter excitation signal, and fall by 22.75% in the actual test.