基于MEMS的航天器表面新型测温传感器设计与实现

Design and implementation of a new style thin film thermocouple based on MEMS for temperature measurement on spacecraft surface

摘要:

鉴于微机械电子系统（Micro-Electro-Mechanical-Systems，MEMS）技术及其在航空航天用传感器设计中的优势，本文根据航天器表面测温的需要，设计了一款新型表面瞬态测温热电偶传感器，重点研究了其线条和热结点图形制作工艺及其优化过程。通过物理试验验证，该型薄膜热电偶比普通热电偶响应时间较短，相对误差较小，满足返回式航天器表面高温的瞬态测温需求。

Abstract:

Base on the advantages of the technology of MEMS in the manufacture of aerospace sensors. According to the requirements of spacecraft surface temperature measurement, a new style of K-type (NiCr/NiSi) thin film thermocouple is designed. The graphic process design of thin film thermocouple is studied, including thermal junction and thin film lead wires. The test shows that the response time of the thin film thermocouple is shorter and the relative error is smaller compared with the traditional thermocouple.