The reliability of equipment was necessary to carry out the task conditions, equipment evaluation could provide theoretical support for the decision task.Most reliability research of equipment evaluation was on probability statistics, however, the accuracy of probability and statistics was limited by the size of the sample, so that the reliability evaluation based on probability and statistics was inevitable which was either largly or smally. In order to solve the problem that the evaluation was restricted by sample size, the method of TOPSIS was introduced. At the same time, aiming at the problem that TOPSIS method was influenced by subjective factors, the ascertained method of evaluation index weight and ideal answers on the TOPSIS were improved, and the evaluation model of equipment reliability based on this improved TOPSIS was build.This paper get rid of the restraint of sample capacity,and also the concept “qualified point line” was introduced into the evaluation result, so that the classification of the evaluation results had a quantitative basis, which reflected the objectivity and scientific. Lastly, the method on this paper was checked to be correct by the example and MATLAB,The evaluation results could provide the decision basis for the user or the commander of the equipment.