基于PMU的小型集成电路测试系统实现及性能分析

Implementation and performance analysis of small scale integrated circuit test system based on PMU

摘要:

文中给出了一种基于精密测量单元的小型集成电路测试系统的设计方法,并对小功率范围进行详细实验验证。该测试系统将电压/电流钳位技术、比较技术、功率扩展技术、恒流源和恒压源技术和四象限驱动技术等多项技术相结合,能够对被测器件(DUT)施加精确地激励值,并准确测量DUT在激励下的响应,该系统同时具备大功率扩展能力满足多种电路测试的需求。系统借助四通道集成仪表放大器电路,结合嵌入式控制器、功率扩展电路以及上位机控制界面共同完成设计,解决了nA级电流无法准确测量的问题,通过优化补偿电路设计,提高电路测试速度。系统性能分析结果表明,文章所设计的小型集成电路测试系统测量精度高、施加激励稳定可靠、响应速度快,相比类似产品节约2/3的硬件设计成本,能够满足集成电路测试中直流参数测试的要求。

Abstract:

A design method of small integrated circuit test system based on precise measurement unit is presented in this paper, and the small power range is verified in detail. The test system the voltage / current clamp technique, comparison of technology, power expansion constant current source and voltage source and four quadrant drive technology, the combination of technology, to the device under test (DUT) applied to precisely and accurately measure the DUT value of the incentive, incentive in the response of the system at the same time. With high power capacity expansion to meet the various needs of the test circuit. The four channel system with integrated instrument amplifier circuit, combining extension circuit and PC control interface to accomplish the design of embedded controller, power, solve the nA current cannot be accurately measured, by optimizing the compensation circuit design, improve the testing speed of circuit. The analysis results show that the performance of the system, integrated circuit test system in the design of high precision, stable and reliable excitation and fast response speed, cost saving compared to 2/3 hardware design of similar products, to meet the integrated circuit DC parameter test requirements.