多测点智能温度传感器设计

Smart Temperature Sensor Based on Multi Measuring Point

摘要:

针对广泛应用的温度检测,设计了一种多测点智能温度传感器。该智能温度传感器将多个常规温度传感元件、信号调理电路、带数字总线接口的微处理器连接起来,利用三维单片智能传感器结构集成在一块硅基片上,实现了三维集成多层结构。同时智能温度传感器利用信号幅度、变化趋势、多测点冗余故障判决和传感信息融合方法,在实现传感故障诊断的同时提高检测准确度。

Abstract:

In view of the widely used temperature measurement, the paper designed a smart temperature sensor based on multi measuring point. The smart temperature sensor connected multi conventional temperature sensing units, signal conditioning circuits, the microprocessor with digital bus interface together, and it was integrated on a silicon substrate using a 3D monolithic structure of smart sensor, the three-dimensional integrated multi-layer structure was realized. The smart temperature sensor used the signal magnitude, trends, fault diagnosis and sensor information fusion method of redundancy measuring point, realizes sensor fault diagnosis and improves the measurement accuracy.