精密离心机动态半径的定位测量技术研究

Research on Positioning Measurement Technique of Dynamic Radius of Precision Centrifuge

摘要:

精密离心机动态半径是影响精密离心机输出加速度精度的主要参数；对于高精度精密离心机的研制,必须对动态半径进行精密测量,并将测量结果作为补偿分量加入到精密离心机输出加速度修正数学模型中,以获得精确的加速度信号,同时为精密离心机输出加速度的精确评定奠定基础；文章介绍了精密离心机动态半径的外基准定位测试技术,包括多个定位平台的定位测试技术论证、测试系统配置等；该方法已应用于某高精度精密离心机动态半径测量中,实测结果表明,采用这种测量方法,动态半径的测量标准差为σ=0.21 μm,其测量精度满足高精度精密离心机研制的技术指标要求。

Abstract:

The dynamic radius affects the precision of acceleration outputted by precision centrifuge, it is a main technique parameter of precision centrifuge and should be measured accurately during the process of precision centrifuge design. Its value will be as compensation component to be added to the acceleration compensation mathematic model, then, the precision centrifuge can obtain acceleration value accurately. This paper introduces the dynamic radius test technique based on external reference, including multiple positioning data identification method of positioning platform, test system configuration and so on. The technique has been applied to the dynamic radius test of high precision centrifuge, the measurement results show that using the measurement technique, the standard deviation of the dynamic radius measurement is 0.21 μm, the measurement result satisfies the requirement of the high precision centrifuge technique indicators. 