精密离心机主轴回转误差测量仿真技术研究

Research on Spindle Rotary Error Test Simulation Technique of Precision Centrifuge

摘要:

精密离心机主轴回转误差直接影响精密离心机动态半径的测量、离心加速度输出精度以及精密离心机主轴运行安全性,必须精确测量主轴回转误差参数；介绍一种应用3个电容测微仪测试并分离主轴回转误差与圆度误差的方法,利用MATLAB对三只电容测微仪安装角度误差、主轴全周采样点数、测试系统本底噪声对主轴回转误差测试结果影响进行仿真分析,得出采样点数N、测微仪安装角度误差δα、δβ以及测试系统本底噪声对回转误差分离的影响,基于仿真结果确定了10-6量级精密离心机主轴回转误差测量的几个工程参数。该方法已应用于某高精度精密离心机主轴回转误差精密测试中,实测表明,转速在300 rpm内精密离心机纯回转误差测量结果为0.25 μm,满足10-6量级高精度精密离心机的研制指标需求。

Abstract:

The rotary error of precision centrifuge affects directly dynamic radius measurement, the acceleration precision outputted by precision centrifuge and the safety of spindle working, it must be measured accurately. The application of capacitance micrometer test with three-point method to separate rotary error and roundness error is introduced. Also, the installation angle error of three capacitance micrometers, the sampling numbers of spindle lap and the test system background noise influence rotary error measurement result are simulated in MATLAB. The influences to rotary error separation caused by sampling N, δα, δβ and noise of test system are obtained. Thus, several technique parameters in rotary error test for 10-6 level high precision centrifuge are certified. This technique has been applied to the spindle rotary error test of high precision centrifuge, the measurement result shows that using this measurement technique, the pure rotary error of spindle is 0.25 μm within speed of 300 rpm, the measurement result satisfies the requirement of the high precision centrifuge technique indicators. 