一种真空离子溅射镀膜设备控制软件的设计

Design of Vacuum Ion Beam Sputter Coating Control Software

摘要:

目前国内外的真空离子镀膜控制软件,都不具有重构功能,导致设备的功能有限,也不能任意修改镀膜程序,且自动化程度也不高；针对这种情况,设计了一种控制软件,以工业计算机为核心,使用Visual Basic.net编程语言编制软件,采用专家系统结构,在Windows操作系统环境下,通过计算机标准接口,控制真空设备中各种常用的部件,可根据产品的需求灵活配置真空镀膜设备;建立了控制指令集,可支持用户自选的光学膜厚仪,具有自主编程功能,可按不同工艺重构镀膜程序;该控制软件已经成功的应用于真空离子溅射镀膜设备,实现了计算机对镀膜设备的自动化智能控制,以及镀膜过程的24小时无人值守。

Abstract:

At present, the vacuum ion plating control software, don't have reconstruction function, causes the equipment function is restricted, cannot be edited coating process, and the degree of automation is not good. In view of this, we design a control software, with industrial computer as the core, using Visual Basic.net programming language compile software, adopts expert system structure, in the Windows operating system environment, standard interface, by computer control, commonly used in a variety of vacuum equipment parts according to the requirements of product flexible configuration vacuum coating equipment, established the control instruction set, enable users to customize the optical film thickness gauge, with independent programming function, can according to different process reconstruct coating procedure. The control software has been successfully applied in the vacuum ion sputtering coating equipment, has realized the computer automation intelligent control of coating equipment, as well as the coating process of unattended 24 hours a day.