Abstract:Hysteresis nonlinearity is the intrinsic characteristic of piezoelectric actuator. In this paper, hysteresis curve of PZT is obtained under different conditions through experimental tests, then the characteristics of hysteresis is further analyzed. According to the above analysis and the data obtained by the measurement, the neural network hysteresis model based on polynomial fitting algorithm is established, and the model can reflect the hysteresis of PZT accurately. Based on this Model, feed-forward control and neuron self-adaptive PID algorithm is applied. The hysteresis error of piezoelectric actuator has been compensated and the output displacement of piezoelectric actuator can be controlled precisely. Thus the hysteresis effect of piezoelectric on micro-positioning system is diminished. Simulation results show that the mean relative error is reduced to 1.34% . This indicates that positioning accuracy of micro/nano-positioning system has been improved , and the system itself has certain self-adaptability and anti-interference ability.