显微视觉检测系统精度分析及校准技术

Analysis and Calibration Technology of Microscope Inspection System

摘要:

为提高显微视觉检测系统的检测精度,建立了检测系统的误差模型,分析了影响检测系统精度的因素,给出了运动系统及视觉系统的误差补偿方法;提出了一种开环控制加位置检测的运动控制方式和一种基于多项式拟合的图像边缘检测算法;实验结果表明,提出的运动控制方式和边缘检测算法有效降低了显微视觉检测系统的系统误差,提高了微小型零件的检测精度。

Abstract:

In order to improve the accuracy of the microscope inspection system, built up the error model of the inspection system. Factors affecting accuracy of the inspection system were analyzed. Proposed the compensation methods of the movement system and visual system. A motion control mode of open-loop control and position detection was designed, and an edge detection arithmetic based on polynomial fitting was proposed. Results showed that the motion control mode and the edge detection arithmetic could reduce the system error, and detection accuracy was improved.