Abstract:Using magnetic levitation technology to design a inertia vibration sensor, by analyzing sensing system’s force, the second order equations in dynamics of sensor system can be derived. Sensing system’s stiffness expression is derived by magnetic circuit analysis, and its damping expression is derived by eddy current analysis, then parameters of sensor are calculated, stiffness value is 140 N/m, natural frequency is 11.2 Hz, damping value is 2.56 N·s/m. By analysis of the temperature error and nonlinear error of the sensor system, error compensation method is put forward:thermal magnetic shunt can compensate the temperature error, compensating coil can compensate the nonlinear error. The sensitivity verified by experimental calibration method is 213 V·s·m-1. Explosion signals are collected by magnetic levitation vibration sensor, the experimental results show that the sensor can be better used in collecting explosion vibration data. The sensor has advantages of high sensitivity, simple structure and preventing electromagnetic interference ability.